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Semitron™ MPR-1000

Polyamide-Imide
Technical datasheet

Semitron™ MPR 1000 PAI shapes possess excellent heat resistance and low rates of outgassing and erosion in plasma chambers. This high purity material with low ionic content is often chosen for vacuum chamber applications within etch, CVD and ion implant sub-segmentations in the semiconductor and electronics industry.

Semitron™ MPR 1000 PAI shows increased lifetime over traditional materials, for example up to 25x over polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.

Semitron® MPR-1000 plastic stock shapes
Product Information

Material Properties

 

  • Low ionic content and low outgassing
  • Excellent heat resistance
  • Minimized rate of erosion in plasma chambers
  • Optimal chip resistance, durability and machinability
  • Designed specifically for demanding chamber applications

 

Available Geometries

Semitron™ MPR-1000 stock shapes encompass a range of standard sizes in the following geometries: Rod, Plate

Rod
Plate

Available Colors

Semitron™ MPR-1000 stock shapes come in the following colors: products.itemGroup.color.9063

Regional Availability

Availability of products, shapes, and colors may differ by region.
Documentation

For further regulatory documentation and absence declarations, please visit the regulatory page.